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4-probe station Cascade Microtech MPS 150

Name: 4-probe station Cascade Microtech MPS 150
Location: CEITEC Brno University of Technology
Instrument description: Probe station CASCADE MPS 150 is a modular probe station system which allows various configurations. System is designed for four-point electrical measurement in temperatures up to 300°C in combination with source measurement units. Machine allows wafer level device characterization I-V/C-V, RF, and another electrical testing.
Research group: CF: CEITEC Nano

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