Experimental PECVD: ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe

Name:	Experimental PECVD: ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe
Technology / Methodology:	Etching & Deposition
Location:	CEITEC Brno University of Technology
Instrument description:	experimental PECVD: ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, Langmuir probe
Research group:	CF: CEITEC Nano

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