Change institution
Advanced Nano and Microtechnologies Advanced Materials Structural Biology Gen. and Prot. of Plant Systems Molecular Medicine Brain and Mind Research Molecular Vet. Medicine

Ion-Beam Sputter Deposition System BESTEC

Name: Ion-Beam Sputter Deposition System BESTEC
Location: CEITEC Brno University of Technology
Instrument description: UHV sputter deposition system is equipped with two RFICP Kaufman ion-beam sources (KRI®) with 4 cm diameter grids (3-grid primary and 2-grid assisted/secondary) and charge neutralizer (LFN 2000 - KRI®). This setup is suitable for Ion-beam sputter deposition, Ion-beam assisted deposition, reactive sputter deposition with nitrogen and in-situ initial/continual substrate (pre-)cleaning. Etching (ion-milling) is not possible due to undesirable chamber and targets contamination.
Research group: CF: CEITEC Nano

If you would like to use this equipment contact the administrator:

*
*
*
*
*
*
 
More CEITEC News ...
Dr. Ondrej Hovorka: Models of magnetic nanoparticles for biomedical applications

29. ledna 2018 9:46

Dr. Ondrej Hovorka: Models of magnetic nanoparticles for biomedical…

LECTURE: Dr. Ondrej Hovorka: Models of magnetic nanoparticles for biomedical applications

Advanced Materials and Nanotechnology Seminar Series 2018: Dr Andriy Marko

25. ledna 2018 18:21

Advanced Materials and Nanotechnology Seminar Series 2018: Dr Andriy…

WHEN: 30. 01. 2018 WHERE: CEITEC BUT, Purkynova 123, large meeting room SPEAKER: Dr Andriy Marko TALK: Advances in PELDOR…