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Home page/Core Facilities/CEITEC Nano Research Infrastructure/Spectroscopic reflectometer Ocean Optics NanoCalc 2000

Spectroscopic reflectometer Ocean Optics NanoCalc 2000

Name: Spectroscopic reflectometer Ocean Optics NanoCalc 2000
Instrument: NanoCalc 2000
Technology / Methodology: Nanolitography infrastructure
Location: CEITEC Brno University of Technology
Instrument description: Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.
More information / Supplier: http://cfnano.ceitec.cz/instrument.php?id=3
Research group: CF: CEITEC Nano
Spectroscopic reflectometer Ocean Optics NanoCalc 2000

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