Name: | SW-BEAMER |
Location: | CEITEC Brno University of Technology |
Instrument description: | Beamer is a comprehensive software platform used for optimization of electron beam lithography process. It is possible to optimize the data pattern to significantly reduce the effects of various error sources such as beam positioning between shapes, filling shapes with "shots" on a discrete grid, field position dependent aberrations, stitching between fields, the spread of energy by electron scattering (proximity) and process effects. |
Research group: | CF: CEITEC Nano |
If you would like to use this equipment contact the administrator: |
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29. ledna 2018 9:46
LECTURE: Dr. Ondrej Hovorka: Models of magnetic nanoparticles for biomedical applications
25. ledna 2018 18:21
WHEN: 30. 01. 2018 WHERE: CEITEC BUT, Purkynova 123, large meeting room SPEAKER: Dr Andriy Marko TALK: Advances in PELDOR…