Events Calendar

Search for the specific conference, workshop or lecture ...

SW-TRACER

Name:	SW-TRACER
Location:	CEITEC Brno University of Technology
Instrument description:	TRACER software simulates a Point Spread Function (PSF) which is essential input for any type of Proximity / Process Effect Correction or e-beam simulation and defines the deposited energy as a function of the distance from the incident beam. One can think of it as the convolution of electron scattering, beam size (or beam blur), and process effects. It offers an easy to use interface for defining the parameters (material data, stack parameters, acceleration voltage), running the Monte Carlo simulation, visualization of r-z simulation results (energy spread at different resist thicknesses), and the extraction of the 1D Point Spread Function which can be used for Proximity Effect Correction (PEC). In addition, the tool contributions such as spot size and process blurs such as diffusion need to be quantified and factored in.
Research group:	CF: CEITEC Nano

More CEITEC News ...

29. ledna 2018 9:46

LECTURE: Dr. Ondrej Hovorka: Models of magnetic nanoparticles for biomedical applications

25. ledna 2018 18:21

WHEN: 30. 01. 2018 WHERE: CEITEC BUT, Purkynova 123, large meeting room SPEAKER: Dr Andriy Marko TALK: Advances in PELDOR…